What is silicide in semiconductor?
What is silicide in semiconductor?
Silicide (compound of silicon with metal) is formed on gates (polysilicon), sources and drains (Si wafer) as three MOS transistor electrodes in order to reduce contact resistance to metal wiring layers to be formed later. This silicide formation also has the effect of lowering the resistance of each electrode.
What are silicide and salicide what are their importance in ic technology processes?
semiconductor industry: “polycide” and “salicide.” The polycide process is a method of patterning the silicide on the polysilicon gate electrode, and the salicide process is a method of self-aligning a silicide layer to all exposed silicon regions.
What is silicide?
A silicide is a compound that has silicon with more electropositive elements. Silicon is more electropositive than carbon. This is a process in which silicide contacts are formed only in those areas in which deposited metal is in direct contact with silicon, hence, the process is self-aligned.
What is silicide diffusion?
Generally, silicide layers are fast diffusion pathes for silicon point defects and other chemical elements. Due to the different linear thermal expansion coefficients of silicide materials compared to other semiconductor materials stress will be induced during thermal treatment.
What is silicide formula?
Molecular Formula. Si2Sr. Synonyms. Strontium silicide. 12138-28-2.
What is the symbol for silicide?
Si
Silicide(1-) is a monoatomic monoanion and an elemental silicon….4.3Related Element.
| Element Name | Silicon |
|---|---|
| Element Symbol | Si |
| Atomic Number | 14 |
What is the use of silicide?
Thin-film silicide layers are used as ohmic contacts, interconnects, and as Schottky barriers for integrated circuits in microelectronic devices due to their low electrical resistivity and good compatibility with silicon substrates relative to polycrystalline silicon.
What is a silicide and how is it formed?
A silicide is a type of chemical compound that combines silicon and a (usually) more electropositive element. The chemical bonds in silicides range from conductive metal-like structures to covalent or ionic. Silicides of all non-transition metals, with exception of beryllium, have been described.